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Glow Discharge Processes : Sputtering and Plasma Etching
by Brian Chapman




Overview -
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications—practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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More About Glow Discharge Processes by Brian Chapman

 
 
 

Overview

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications—practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.


This item is Non-Returnable.

 

Details

  • ISBN-13: 9780471078289
  • ISBN-10: 047107828X
  • Publisher: Wiley-Interscience
  • Publish Date: September 1980
  • Page Count: 432
  • Dimensions: 9.7 x 6.18 x 1.21 inches
  • Shipping Weight: 1.64 pounds


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