{
"item_title" : "Sputtering by Particle Bombardment III",
"item_author" : [" Rainer Behrisch", "R. Behrisch", "Klaus Wittmaack "],
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Sputtering by Particle Bombardment III : Characteristics of Sputtered Particles, Technical Applications
Overview
Sputtering, the ejection of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This final volume in a three-part review of sputtering deals with the characterization of the sputtered particles and applications of the technique. It will be of interest to researchers in universities and in industry.
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Details
- ISBN-13: 9783662311042
- ISBN-10: 3662311046
- Publisher: Springer
- Publish Date: August 2014
- Dimensions: 9.21 x 6.14 x 0.89 inches
- Shipping Weight: 1.34 pounds
- Page Count: 415
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