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Analytical Modeling of Impurity Diffusion and Associated Transport Phenomena in Microelectronics
Overview
Presenting original analytical solutions and processes optimization for the impurity diffusion in silicon, polysilicon/silicon, gallium arsenide and silicon carbide semiconductor materials, the purpose of this book is to serve as a working manual for the design and process engineers from any laboratory, investigation establishment and plant, for the preparation and fabrication of microelectronics devices and microsystems, as part of the Information Technology (IT).
This item is Non-Returnable
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Details
- ISBN-13: 9781036461263
- ISBN-10: 1036461262
- Publisher: Cambridge Scholars Publishing
- Publish Date: December 2025
- Dimensions: 8 x 6 x 0.5 inches
- Shipping Weight: 0.7 pounds
- Page Count: 158
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