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CMOS Plasma and Process Damage|Kirk Prall

CMOS Plasma and Process Damage

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Overview

This book discusses the complex technology of building CMOS computer chips and covers some of the unusual problems that can occur during chip manufacturing. Readers will learn how plasma and process damage results from the high-energy processes that are used in chip manufacturing, causing harm to the chips, functional failure and reliability problems.

This item is Non-Returnable

Details

  • ISBN-13: 9783031890314
  • ISBN-10: 3031890310
  • Publisher: Springer
  • Publish Date: May 2026
  • Page Count: 466

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