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Design, Modeling and Control of Nanopositioning Systems|Andrew J. Fleming

Design, Modeling and Control of Nanopositioning Systems

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Overview

Introduction.- Piezoelectric Transducers.- Types of Nanopositioners.- Mechanical Design: Flexure-based Nanopositioners.- Position Sensors.- Shunt Control.- Feedback Control.- Force Feedback Control.- Feedforward Control.- Command Shaping.- Hysteresis Modeling and Control.- Charge Drives.- Noise in Nanopositioning Systems.- Electrical Considerations.

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Details

  • ISBN-13: 9783319354385
  • ISBN-10: 3319354388
  • Publisher: Springer
  • Publish Date: September 2016
  • Dimensions: 9.21 x 6.14 x 0.87 inches
  • Shipping Weight: 1.31 pounds
  • Page Count: 411

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