Diffusion in Semiconductors [With *]
Overview
Subvolume A of two subvolumes on Diffusion in Semiconductors and Non-Metallic Solids consists of a comprehensive and critical compilation of data for the following materials and properties: diffusion in silicon, germanium and their alloys, diffusion in compound semiconductors, diffusion in silicides, chemical diffusion in bulk inhomogeneous semiconductors, grain-boundary and dislocation diffusion in semiconductors and silicides and surface diffusion on semiconductors. Although most of the silicides are not semiconducting, this chapter is included here because a number of them have become integrated in the Si technology and because they were not covered in the previous volume III/26 on diffusion in metallic substances. Subvolume A contains a CD-ROM.
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Details
- ISBN-13: 9783540609643
- ISBN-10: 3540609644
- Publisher: Springer
- Publish Date: March 1998
- Dimensions: 10.63 x 7.6 x 0.98 inches
- Shipping Weight: 3.39 pounds
- Page Count: 476
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