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Fabrication Engineering at the Micro- And Nanoscale
Overview
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.This item is Non-Returnable
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Details
- ISBN-13: 9780199861224
- ISBN-10: 0199861226
- Publisher: Oxford University Press
- Publish Date: November 2012
- Dimensions: 9.29 x 7.55 x 1.03 inches
- Shipping Weight: 2.37 pounds
- Page Count: 688
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