A Guide to Hands-on MEMS Design and Prototyping
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Overview
Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well and exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.
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Details
- ISBN-13: 9780521889254
- ISBN-10: 0521889251
- Publisher: Cambridge University Press
- Publish Date: August 2011
- Dimensions: 9 x 6 x 0.6 inches
- Shipping Weight: 0.88 pounds
- Page Count: 178
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