{
"item_title" : "Handbook of Advanced Plasma Processing Techniques",
"item_author" : [" R. J. Shul", "S. J. Pearton "],
"item_description" : "The ability to make small features in Si, metals, dielectrics and other materials is what has enabled rapid advances in computing, communications, aeronautics and all other technologies that depend on microelectronics, miniature sensors and actuators and magnetic data storage. Plasma techniques enable the fine control and accurate pattern transfer and thus are central to our technology age.",
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Overview
The ability to make small features in Si, metals, dielectrics and other materials is what has enabled rapid advances in computing, communications, aeronautics and all other technologies that depend on microelectronics, miniature sensors and actuators and magnetic data storage. Plasma techniques enable the fine control and accurate pattern transfer and thus are central to our technology age.
This item is Non-Returnable
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Details
- ISBN-13: 9783540667728
- ISBN-10: 3540667725
- Publisher: Springer
- Publish Date: August 2000
- Dimensions: 9.4 x 6.5 x 1.23 inches
- Shipping Weight: 2.32 pounds
- Page Count: 655
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