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{ "item_title" : "Handbook of Photomask Manufacturing Technology", "item_author" : [" Syed Rizvi "], "item_description" : "As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it is increasingly important for new technologies to keep pace with these demands. Photomask technology is one of the key areas to achieving this goal. This valuable reference provides a comprehensive summary of all areas of mask technology in a single work, featuring contributions from 40 internationally reputable authors from industry, academia, government, national labs, and consortia. They discuss conventional masks and their supporting technologies, as well as next-generation technologies such as extreme ultraviolet, electron projection, ion projection, and X-ray lithography.", "item_img_path" : "https://covers1.booksamillion.com/covers/bam/0/82/475/374/0824753747_b.jpg", "price_data" : { "retail_price" : "370.00", "online_price" : "370.00", "our_price" : "370.00", "club_price" : "370.00", "savings_pct" : "0", "savings_amt" : "0.00", "club_savings_pct" : "0", "club_savings_amt" : "0.00", "discount_pct" : "10", "store_price" : "" } }
Handbook of Photomask Manufacturing Technology|Syed Rizvi

Handbook of Photomask Manufacturing Technology

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Overview

As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it is increasingly important for new technologies to keep pace with these demands. Photomask technology is one of the key areas to achieving this goal. This valuable reference provides a comprehensive summary of all areas of mask technology in a single work, featuring contributions from 40 internationally reputable authors from industry, academia, government, national labs, and consortia. They discuss conventional masks and their supporting technologies, as well as next-generation technologies such as extreme ultraviolet, electron projection, ion projection, and X-ray lithography.

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Details

  • ISBN-13: 9780824753740
  • ISBN-10: 0824753747
  • Publisher: CRC Press
  • Publish Date: March 2005
  • Dimensions: 10.3 x 7.2 x 1.53 inches
  • Shipping Weight: 3.15 pounds
  • Page Count: 728

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