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Lithography|Bakshi

Lithography

by Bakshi
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Overview

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

This item is Non-Returnable

Details

  • ISBN-13: 9780470471555
  • ISBN-10: 0470471557
  • Publisher: John Wiley & Sons
  • Publish Date: December 2008
  • Dimensions: 10 x 7 x 1.7 inches
  • Shipping Weight: 3.43 pounds
  • Page Count: 704

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