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Microlithography : Science and Technology
by Bruce W. Smith and Kazuaki Suzuki
Other Available Formats
Overview
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
This item is Non-Returnable
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Details
- ISBN-13: 9781439876756
- ISBN-10: 1439876754
- Publisher: CRC Press
- Publish Date: May 2020
- Dimensions: 10.08 x 7.09 x 1.65 inches
- Shipping Weight: 2.95 pounds
- Page Count: 838
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