Microsystems Dynamics
Overview
Foreword; Preface; Introduction to Microsystems; Fabrication Technologies of Microsystems; Overview; Nickel Surface Micromachining Technology for Fabrication of Microswitches; UV Lithography for Fabrication of Micromotors; Common MEMS Actuators; Parallel Plate Capacitors; Comb Drives; Electrostatic Micromotors; Electrostatic Microswitches; Theoretical Background of Multiphysical Interactions Common in Microsystems; Introduction to Coupled-Field Modeling; Electrostatic Actuation and Pull-in Instability; Viscous Air Damping; Vibro-Impact Interactions; Experimental Testing of Microsystem Dynamics; Vibration Excitation Methods; Optical Techniques for Measurement of Vibrations of Microstructures; Study of Elastic Vibro-Impact Macrosystems and Microsystems; Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact; Macrosystems;;Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator; Numerical Modeling and Analysis of Fluidic-Structural Interaction; Numerical Modeling and Analysis of Electrostatic-Structural Interaction; Numerical Modeling and Analysis of Vibro-Impact Interaction; Numerical Analysis of the Micromotor; Finite Element Modeling of Micromotor; Modal Analysis; Micromotor Control; Analytical Model of a Micromotor; Basics of Micromotor Geometry; Torque Analysis; Micromotor Design Guidelines; References
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Details
- ISBN-13: 9789048197002
- ISBN-10: 9048197007
- Publisher: Springer
- Publish Date: November 2010
- Dimensions: 9.21 x 6.14 x 0.56 inches
- Shipping Weight: 1.08 pounds
- Page Count: 214
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