{
"item_title" : "Modelling of Microfabrication Systems",
"item_author" : [" Raja Nassar", "Weizhong Dai "],
"item_description" : "This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.",
"item_img_path" : "https://covers3.booksamillion.com/covers/bam/3/64/205/536/3642055362_b.jpg",
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Overview
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
This item is Non-Returnable
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Details
- ISBN-13: 9783642055362
- ISBN-10: 3642055362
- Publisher: Springer
- Publish Date: December 2010
- Dimensions: 9.21 x 6.14 x 0.59 inches
- Shipping Weight: 0.87 pounds
- Page Count: 270
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