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Modelling of Microfabrication Systems|Raja Nassar

Modelling of Microfabrication Systems

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Overview

This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

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Details

  • ISBN-13: 9783642055362
  • ISBN-10: 3642055362
  • Publisher: Springer
  • Publish Date: December 2010
  • Dimensions: 9.21 x 6.14 x 0.59 inches
  • Shipping Weight: 0.87 pounds
  • Page Count: 270

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