Ask Bookie
{
"item_title" : "Plasma Electronics",
"item_author" : [" Toshiaki Makabe", "Zoran Lj Petrovic "],
"item_description" : "Emphasizing computational algorithms and techniques, this updated edition of a popular monograph provides a complete picture of plasma physics, computational methods, cutting-edge applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. This edition reflects recent progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process.",
"item_img_path" : "https://covers3.booksamillion.com/covers/bam/1/13/803/415/1138034150_b.jpg",
"price_data" : {
"retail_price" : "120.99", "online_price" : "120.99", "our_price" : "120.99", "club_price" : "120.99", "savings_pct" : "0", "savings_amt" : "0.00", "club_savings_pct" : "0", "club_savings_amt" : "0.00", "discount_pct" : "10", "store_price" : ""
}
}
Plasma Electronics : Applications in Microelectronic Device Fabrication
by Toshiaki Makabe and Zoran Lj Petrovic
Other Available Formats
Overview
Emphasizing computational algorithms and techniques, this updated edition of a popular monograph provides a complete picture of plasma physics, computational methods, cutting-edge applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. This edition reflects recent progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process.
This item is Non-Returnable
Customers Also Bought
- 1
Details
- ISBN-13: 9781138034150
- ISBN-10: 1138034150
- Publisher: CRC Press
- Publish Date: October 2016
- Dimensions: 9.21 x 6.14 x 0.85 inches
- Shipping Weight: 1.27 pounds
- Page Count: 412
Related Categories
