{
"item_title" : "Plasma Processing of Semiconductors",
"item_author" : [" P. F. Williams "],
"item_description" : "Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.",
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Plasma Processing of Semiconductors
Overview
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
This item is Non-Returnable
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Details
- ISBN-13: 9780792345671
- ISBN-10: 0792345673
- Publisher: Springer
- Publish Date: May 1997
- Dimensions: 9.44 x 6.2 x 1.5 inches
- Shipping Weight: 2.38 pounds
- Page Count: 613
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