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Predictive Simulation of Semiconductor Processing : Status and Challenges
by Jarek Dabrowski and Eicke R. Weber
Overview
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.
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Details
- ISBN-13: 9783540204817
- ISBN-10: 3540204814
- Publisher: Springer
- Publish Date: May 2004
- Dimensions: 9.7 x 6.5 x 1.5 inches
- Shipping Weight: 2.35 pounds
- Page Count: 490
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