{ "item_title" : "Run-To-Run Control in Semiconductor Manufacturing", "item_author" : [" James Moyne", "Enrique Del Castillo", "Arnon M. Hurwitz "], "item_description" : "Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine runs, thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.", "item_img_path" : "https://covers2.booksamillion.com/covers/bam/0/84/931/178/0849311780_b.jpg", "price_data" : { "retail_price" : "245.00", "online_price" : "245.00", "our_price" : "245.00", "club_price" : "245.00", "savings_pct" : "0", "savings_amt" : "0.00", "club_savings_pct" : "0", "club_savings_amt" : "0.00", "discount_pct" : "10", "store_price" : "" } }

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