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Substrate Surface Preparation Handbook
Overview
Covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits, this title offers engineers detailed guidance in the entire substrate surface preparation process, from lapping and polishing... to specialized techniques and surface finishing.
This item is Non-Returnable
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Details
- ISBN-13: 9781608072132
- ISBN-10: 1608072134
- Publisher: Artech House Publishers
- Publish Date: November 2011
- Dimensions: 9.2 x 6.2 x 0.6 inches
- Shipping Weight: 0.85 pounds
- Page Count: 195
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