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Ultra-Clean Technology Handbook|Tadahiro Ohmi

Ultra-Clean Technology Handbook : Volume 1: Ultra-Pure Water

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Overview

Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules.

This item is Non-Returnable

Details

  • ISBN-13: 9780367402341
  • ISBN-10: 0367402343
  • Publisher: CRC Press
  • Publish Date: June 2020
  • Dimensions: 9.6 x 6.9 x 2.3 inches
  • Shipping Weight: 3.83 pounds
  • Page Count: 944

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