{ "item_title" : "User's Guide for RM 8096 and 8097", "item_author" : [" U. S. Department of Commerce "], "item_description" : "The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property measurements. RM 8096 was fabricated on a multiuser 1.5 m complementary metal oxide semiconductor (CMOS) process followed by a bulkmicromachining etch. Material properties of the composite oxide layer are reported on the RM Report of Investigation and described within this guide.3 RM 8097 was fabricated using a polysilicon multi-user surface-micromachining MEMS process with a backside etch. The material properties of the first or second polysilicon layer are reported on the RM Report of Investigation and described within this guide.", "item_img_path" : "https://covers4.booksamillion.com/covers/bam/1/49/921/193/1499211937_b.jpg", "price_data" : { "retail_price" : "19.99", "online_price" : "19.99", "our_price" : "19.99", "club_price" : "19.99", "savings_pct" : "0", "savings_amt" : "0.00", "club_savings_pct" : "0", "club_savings_amt" : "0.00", "discount_pct" : "10", "store_price" : "" } }

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