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Micro and Nanomanufacturing|Mark J. Jackson

Micro and Nanomanufacturing

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Overview

The aim and scope of this book is to focus on providing the industrial and research community with a single source of information on micro and nanofabrication techniques. as they apply to a variety of engineering materials. The hands-on material in the book shows how to apply established and research based laboratory manufacturing techniques as they apply to a variety of engineering materials including silicon.

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Details

  • ISBN-13: 9781441938459
  • ISBN-10: 1441938451
  • Publisher: Springer
  • Publish Date: October 2010
  • Dimensions: 9.1 x 6.1 x 1.7 inches
  • Shipping Weight: 2.16 pounds
  • Page Count: 702

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