{
"item_title" : "Modelling of Microfabrication Systems",
"item_author" : [" Raja Nassar", "Weizhong Dai "],
"item_description" : "This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.",
"item_img_path" : "https://covers2.booksamillion.com/covers/bam/3/54/000/252/3540002529_b.jpg",
"price_data" : {
"retail_price" : "169.99", "online_price" : "169.99", "our_price" : "169.99", "club_price" : "169.99", "savings_pct" : "0", "savings_amt" : "0.00", "club_savings_pct" : "0", "club_savings_amt" : "0.00", "discount_pct" : "10", "store_price" : ""
}
}
Overview
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
This item is Non-Returnable
Customers Also Bought
Details
- ISBN-13: 9783540002529
- ISBN-10: 3540002529
- Publisher: Springer
- Publish Date: June 2003
- Dimensions: 9.5 x 6.4 x 0.8 inches
- Shipping Weight: 1.24 pounds
- Page Count: 270
Related Categories
