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Optical Inspection of Microsystems, Second Edition
Overview
This book provides an up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Techniques such as interference microscopy, laser Doppler vibrometry, holography, speckle metrology, spectroscopy and deflectrometry and digital holographic microscropy for the inspection of MEMS.
This item is Non-Returnable
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Details
- ISBN-13: 9781498779470
- ISBN-10: 1498779476
- Publisher: CRC Press
- Publish Date: June 2019
- Dimensions: 10.1 x 7.2 x 1.3 inches
- Shipping Weight: 2.9 pounds
- Page Count: 570
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