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Optical Inspection of Microsystems|Wolfgang Osten

Optical Inspection of Microsystems

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Overview

This book offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.

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Details

  • ISBN-13: 9780367390570
  • ISBN-10: 0367390574
  • Publisher: CRC Press
  • Publish Date: October 2019
  • Dimensions: 9.9 x 7 x 1.3 inches
  • Shipping Weight: 2.8 pounds
  • Page Count: 532

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