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Optical Inspection of Microsystems
Overview
This book offers a timely review of research into applying optical measurement techniques for microsystems. These techniques are non-invasive and fieldwise in character and have high sensitivity, accuracy, and resolution of data points. This text presents state-of-the-art methods of optical analysis and enumerates their basic components.
This item is Non-Returnable
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Details
- ISBN-13: 9780367390570
- ISBN-10: 0367390574
- Publisher: CRC Press
- Publish Date: October 2019
- Dimensions: 9.9 x 7 x 1.3 inches
- Shipping Weight: 2.8 pounds
- Page Count: 532
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